Details

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The Agilent CDG-500 series of temperature compensated Capacitance Diaphragm gauges provides a high level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 Torr to 1 Torr. The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warm-up times and unparalleled robustness.

Technical Specifications

Measurement range (full scale)	Torr		1000	100		10		1
	Pa		133,322	13,332		1,333		133
	mbar		1333	133		13.3		1.3
	% of reading		0.2	0.2		0.2		0.2
Temperature effect On zero	On zero	% F.S. / °C	0.005	0.005		0.005		0.015
	On span	% of reading/ °C	0.01	0.01		0.01		0.01
Resolution	% F.S.		0.003	0.003		0.003		0.003
Pressure, maximum	kPa (absolute)		400	260		260		260
Lowest reading	% F.S.		0.01
Lowest suggested reading	% F.S.		0.05
Lowest suggested control pressure	% F.S.		0.05
Temperature			Operation (ambient)		Bakeout (at flange)2		Storage
			5 to 50 °C		<110 °C		–40 to 65 °C
Supply voltage			14 to 30 VDC
Power consumption			<1 W
Output signal (analog)			0 to 10 VDC
Response time			30 ms
Degree of protection			IP30
Electrical connection			D-sub, 15 pole, male
Setpoints3 – Two (2) setpoints, SP 1 and SP 2			Relay Contact			Hysteresis
			30 VDC; <0.5 ADC			1% of F.S
Materials exposed to vacuum			Aluminum oxide ceramic (Al2O3), Vacon 704, stainless steel (AlSl 316L5) AgCuTi hard solder, sealing glass

CDG-500 Capacitance Diaphragm Gauge (1000 Torr) CDG500T1000KF16 CDG500T1000VCR8 CDG-500 Capacitance Diaphragm Gauge (100 Torr) CDG500T0100KF16 CDG500T0100VCR8 CDG-500 Capacitance Diaphragm Gauge (10 Torr) CDG500T0010KF16 CDG500T0010VCR8 CDG-500 Capacitance Diaphragm Gauge (1 Torr) CDG500T0001KF16 CDG500T0001VCR8 CDG-500 Capacitance Diaphragm Gauge (1000 Torr) with setpoints CDG500T1000KF16S CDG500T1000VCR8S CDG-500 Capacitance Diaphragm Gauge (100 Torr) with setpoints CDG500T0100KF16S CDG500T0100VCR8S CDG-500 Capacitance Diaphragm Gauge (10 Torr) with setpoints CDG500T0010KF16S CDG500T0010VCR8S CDG-500 Capacitance Diaphragm Gauge (1 Torr) with setpoints CDG500T0001KF16S CDG500T0001VCR8S