Trek 646 Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV
Category: E-Chuck Supplies
Specifications
Details
Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV
Advanced Energy’s Trek 646 software-driven electrostatic chuck supply offers versatility and performance for use in multiple processes.
- Output Phasing: 0 to ±3 kV
- Output Voltage Range: 0 to ±3 kV
- Output Current Range: 0 to ±6.5 mADC with a peak capability of 10 mA
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