Details
Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
- Highest pumping speed available.
- Fluid level sight glass provides quick indication of pump fluid status at all times.
- Fill and drain assembly for pump oil.
- High throughput, 5100-watt version available.
- Fractionating jet purifies fluid.
- High tolerable forepressure.
- Full thermal protection.
- Stainless steel pump body
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Technical Specifications
Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 3,650 l/s Air, 4,560 l/s He/H2 5,300 l/s Air Maximum Throughput 6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (10.0 mbar l/s) @ 0.01 torr Operating Range 1.7 x 10-3 to <5 x 10-9 torr at 4400 W (2.3 x 10-3 to <6.5 x 10-9 mbar) Maximum Forepressure No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar) Recommended Backing Pump ≥ 30 cfm (51 m3/hr) Backstreaming Rate, Standard Cold Cap <5.0 x 10-4 mg/cm2/min Warmup Time 15 minutes Cooldown Time 25 minutes Fluid Charge 1,000 cc Electrical Requirements 3 ph, 50/60 Hz, 208/240/380/480 VAC Pump Power 4400 watts Cooling Water Requirements 0.40 gpm (80 l/hr) Water Connections 1⁄8 in. FPT Tee
Speed Curve Graph
Pumping Speed/Standard Cold Cap Pumping speed/Extended Cold Cap Throughput
Outline Drawing
| Description | Weight kg (lbs) | Part Number | |
| VHS-10 Pumps | ASA | ISO | |
| VHS-10 with standard cold cap, 208 V | 68 (150) | F0426307 | L5920307 |
| VHS-10 with extended cold cap, 208 V | 68 (150) | F0426317 | L5920317 |
| VHS-10 with standard cold cap, 240 V | 68 (150) | F0426308 | L5920308 |
| VHS-10 with extended cold cap, 240 V | 68 (150) | F0426318 | L5920318 |
| VHS-10 with standard cold cap, 380 V | 68 (150) | F0426326 | L5920326 |
| VHS-10 with extended cold cap, 380 V | 68 (150) | F0426336 | L5920336 |
| VHS-10 with standard cold cap, 480 V | 68 (150) | F0426309 | L5920309 |
| VHS-10 with extended cold cap, 480 V | 68 (150) | F0426319 | L5920319 |
| Accessories | Weight kg (lbs) | Part Number | |
| Water-cooled baffle with ASA flanges | 9.0 (20.0) | F8600310 | |
| Water-cooled baffle with ISO flanges | 9.0 (20.0) | F8600311 | |
| DC-702 diffusion pump fluid, 500 cc (two required) | 2.8 (6.0) | 695472005 | |
| DC-704 diffusion pump fluid, 500 cc (two required) | 2.8 (6.0) | 695474005 | |
| DC-705 diffusion pump fluid, 500 cc (two required) | 2.8 (6.0) | 695475005 | |
| Centering ring for ISO foreline flange, 63K | 0.5 (1.0) | IC063SV | |
| Instruction manual | 699901023 | ||
| Replacement Parts (six heaters required per pump) | |||
| 2200 W, 208 V heater | 0.5 (1.0) | 647310140 | |
| 2200 W, 240 V heater | 0.5 (1.0) | 647310150 | |
| 2200 W, 380 V heater | 0.5 (1.0) | 647310160 | |
| 2200 W, 480 V heater | 0.5 (1.0) | 647310170 | |
| 2550 W, 208 V heater | 0.5 (1.0) | 647310145 | |
| 2550 W, 240 V heater | 0.5 (1.0) | 647310155 | |
| 2550 W, 380 V heater | 0.5 (1.0) | 647310165 | |
| 2550 W, 480 V heater | 0.5 (1.0) | 647310175 | |
| Heater crush plate (covers both heaters; one required for pump; replace when either heater is replaced) | 1.0 (2.0) | K7667001 | |
| Heater clamping plate (one required per pump) | 0.5 (1.0) | R2667301 | |
| Replacement nickel heater wire (#10 AWG) | 0.5 (1.0) | 656179100 | |
| Replacement o-ring kit (kit contains: 1 inlet flange o-ring (butyl F0430001), 1 foreline flange o-ring (butyl 2-338), sight glass o-ring and gasket, 10 fill and drain o-rings (Viton 2-113)) | 1.0 (0.5) | K0377185 | |
| Thermal switch (set at 300° F 147 °C) | 0.5 (1.0) | 642906025 | |
| Extended cold cap | 2.0 (0.9) | L8917301 | |
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